Верхнее меню

Modified Electrocapacitive Method for Nanometrology



I.A. Novikov
S.V. Petrovih
S.A. Yakovlev
novikov_ia@voenmeh.ru
ptv45sv@rambler.ru
iakovlev_sa@voenmeh.ru
Professor, the Department of Small Arms, Artillery and Rocket Weapons, D.F. Ustinov Baltic State Technical University «VOENMEH», Doctor of Engineering, Professor
Leading Engineer, the Department of Small Arms, Artillery and Rocket Weapons, D.F. Ustinov Baltic State Technical University «VOENMEH»
Lecturer, the Department of Small Arms, Artillery and Rocket Weapons, D.F. Ustinov Baltic State Technical University «VOENMEH»
St. Petersburg
St. Petersburg
St. Petersburg

Keywords:

  • modified
  • electrocapacitive method’ liquid metal
  • electrode
  • nanometrology
  • nanoindustry
  • dielectric
  • thin
  • film
  • nanocoating
  • We offer a modification of the two-electrode electrocapacitive method using a liquid-metal fusible electrode. The modified method can be used to measure dielectric nanometer films placed on a metal substrate of random shape. The work description includes an electrophysical model of measurements, the stand block diagram, the measurements technique. The formulas were obtained to process the measurement results and to determine the nanocoating depth. We suggest implementing the method using the measuring stand made of a measuring cell, electronic components, and a computer. The computer is used for mathematical processing of measurement results as well as algorithms to calculate the depth of the nanocoating. We carried out certain measurements for organofluoriсnanocoating applied on flat metal samples. Measurements were carried out for nanocoating with a single molecular layer, and with multimolecular layers. The results of measurementsprocessing showed that the modified electrocapacitive method is accurate enough.